@article{oai:tohoku.repo.nii.ac.jp:00130345,
 author = {T, Narushima and T, Goto and T, Hirai and Y, Iguchi},
 issue = {10},
 journal = {Materials Transactions, JIM},
 month = {},
 note = {学術論文(Ariticle)},
 pages = {821--835},
 title = {High-Temperature Oxidation of Silicon Carbide and Silicon Nitride},
 volume = {38},
 year = {1997}
}