@misc{oai:tohoku.repo.nii.ac.jp:00131329,
 author = {瀨山, 耕平},
 month = {2020-08-26, 2020-08-26, 2020-09-16, 2020-09-16},
 note = {博士学位論文 (Thesis(doctor)), 要約のみ},
 title = {半導体実装装置の高精度化・高速化に関する研究},
 year = {}
}