@phdthesis{oai:tohoku.repo.nii.ac.jp:00131330,
 author = {鷹巣, 良史},
 month = {2020-08-26, 2020-08-26, 2022-12-23, 2022-12-23},
 note = {博士学位論文 (Thesis(doctor))},
 school = {Tohoku University},
 title = {窒化ガリウムウェハの紫外線援用高効率・低ダメージ加工に関する研究},
 year = {}
}