@article{oai:tohoku.repo.nii.ac.jp:00132339,
 author = {Yutaka, Ohno and Hideto, Yoshida and Naoto, Kamiuchi and Ryotaro, Aso and Seiji, Takeda and Yasuo, Shimizu and Yasuyoshi, Nagai and Jianbo, Liang and Naoteru, Shigekawa},
 issue = {SB},
 journal = {Japanese Journal of Applied Physics},
 month = {Nov},
 note = {学術論文(Ariticle)},
 pages = {SBBB05-1--SBBB05-5},
 title = {Impact of focused ion beam on structural and compositional analysis of interfaces fabricated by surface activated bonding},
 volume = {59},
 year = {2019}
}