@article{oai:tohoku.repo.nii.ac.jp:00133200,
 author = {鷹巣, 良史 and 嶋田, 慶太 and 水谷, 正義 and 厨川, 常元},
 issue = {11},
 journal = {砥粒加工学会誌},
 month = {Nov},
 note = {学術論文(Ariticle)},
 pages = {569--574},
 title = {単結晶窒化ガリウム（GaN）基板の高速高精度加工法の開発 ―紫外線援用テープ研削法の提案―},
 volume = {63},
 year = {2019}
}