@article{oai:tohoku.repo.nii.ac.jp:00133306, author = {Reina, Miyagawa and Yutaka, Ohno and Momoko, Deura and Ichiro, Yonenaga and Osamu, Eryu}, issue = {2}, journal = {Japanese Journal of Applied Physics}, month = {Jan}, note = {学術論文(Ariticle)}, pages = {025602-1--025602-4}, title = {Characterization of femtosecond-laser-induced periodic structures on SiC substrates}, volume = {57}, year = {2018} }