@article{oai:tohoku.repo.nii.ac.jp:00138142,
 author = {渋谷, 凱政},
 issue = {1},
 journal = {東北大学電通談話会記録},
 month = {Jul},
 note = {紀要類（bulletin）},
 pages = {146--147},
 title = {金属/SiO2/SiC構造へのSi窒化膜界面制御層導入プロセスに関する研究},
 volume = {91},
 year = {2022}
}