@article{oai:tohoku.repo.nii.ac.jp:00026601,
 author = {Sekiguchi, Atsuko and Koike, Junichi and Maruyama, Kouichi},
 issue = {7},
 journal = {Materials Transactions},
 month = {},
 note = {学術論文 (Article)},
 pages = {1633--1637},
 title = {Formation of slit-llike voids at trench corners of damascene Cu interconnects},
 volume = {43},
 year = {2002}
}