{"created":"2023-07-27T04:43:30.925686+00:00","id":42515,"links":{},"metadata":{"_buckets":{"deposit":"da7cc10d-690a-4649-993b-da4aa25bdfb1"},"_deposit":{"created_by":3,"id":"42515","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"42515"},"status":"published"},"_oai":{"id":"oai:tohoku.repo.nii.ac.jp:00042515","sets":["79:240"]},"author_link":["95870","95869","95872","95864","95867","95868","95875","95873","95877","95874","95871","95866","95865","95876"],"item_2_alternative_title_20":{"attribute_name":"その他の言語のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Corrosion Resistance of Aluminum Nitride as Semiconductor Equipment Parts Studied by Micro-Raman Spectroscopy"}]},"item_2_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2003","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"1300","bibliographicPageEnd":"938","bibliographicPageStart":"935","bibliographicVolumeNumber":"111","bibliographic_titles":[{"bibliographic_title":"日本セラミックス協会学術論文誌"}]}]},"item_2_date_62":{"attribute_name":"登録日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2012-01-27","subitem_date_issued_type":"Created"}]},"item_2_date_63":{"attribute_name":"公開日（投稿完了日）","attribute_value_mlt":[{"subitem_date_issued_datetime":"2012-01-27","subitem_date_issued_type":"Created"}]},"item_2_date_65":{"attribute_name":"発行日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2003","subitem_date_issued_type":"Created"}]},"item_2_date_80":{"attribute_name":"更新日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2012-01-27","subitem_date_issued_type":"Created"}]},"item_2_description_41":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"学術論文 (Article)","subitem_description_type":"Other"}]},"item_2_full_name_2":{"attribute_name":"著者(ヨミ)","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"95871","nameIdentifierScheme":"WEKO"}],"names":[{"name":"FUJIMORI, Hirotaka"}]},{"nameIdentifiers":[{"nameIdentifier":"95872","nameIdentifierScheme":"WEKO"}],"names":[{"name":"TAMURA, Yoji"}]},{"nameIdentifiers":[{"nameIdentifier":"95873","nameIdentifierScheme":"WEKO"}],"names":[{"name":"HARITA, Akira"}]},{"nameIdentifiers":[{"nameIdentifier":"95874","nameIdentifierScheme":"WEKO"}],"names":[{"name":"IOKU, Koji"}]},{"nameIdentifiers":[{"nameIdentifier":"95875","nameIdentifierScheme":"WEKO"}],"names":[{"name":"KAKIHANA, Masato"}]},{"nameIdentifiers":[{"nameIdentifier":"95876","nameIdentifierScheme":"WEKO"}],"names":[{"name":"YOSHIMURA, Masahiro"}]},{"nameIdentifiers":[{"nameIdentifier":"95877","nameIdentifierScheme":"WEKO"}],"names":[{"name":"GOTO, Seishi"}]}]},"item_2_publisher_34":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"日本セラミックス協会"}]},"item_2_radio_69":{"attribute_name":"公開範囲","attribute_value_mlt":[{"subitem_radio_item":"学外"}]},"item_2_rights_13":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"日本セラミックス協会"},{"subitem_rights":"本文データは学協会の許諾に基づきCiNiiから複製したものである"}]},"item_2_select_76":{"attribute_name":"大学情報DB画面区分","attribute_value_mlt":[{"subitem_select_item":"K020"}]},"item_2_select_78":{"attribute_name":"大学情報DBリポジトリ区分","attribute_value_mlt":[{"subitem_select_item":"許諾"}]},"item_2_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0914-5400","subitem_source_identifier_type":"ISSN"}]},"item_2_text_74":{"attribute_name":"登録者コメント","attribute_value_mlt":[{"subitem_text_value":"井奥 洪二"}]},"item_2_text_77":{"attribute_name":"大学情報DBリンク番号","attribute_value_mlt":[{"subitem_text_value":"87270"}]},"item_2_version_type_16":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"藤森,  宏高"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"田村,  洋二"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"針田, 彬"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"井奥, 洪二"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"垣花, 眞人"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"吉村, 昌弘"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"後藤,  誠史"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-02-16"}],"displaytype":"detail","filename":"110002288152.pdf","filesize":[{"value":"675.9 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"110002288152.pdf","url":"https://tohoku.repo.nii.ac.jp/record/42515/files/110002288152.pdf"},"version_id":"4c4cc6d8-42a6-4110-a116-46805e5a53a2"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"顕微ラマン散乱による窒化アルミニウム半導体製造装置用部品の耐食性に関する研究","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"顕微ラマン散乱による窒化アルミニウム半導体製造装置用部品の耐食性に関する研究"}]},"item_type_id":"2","owner":"3","path":["240"],"pubdate":{"attribute_name":"公開日","attribute_value":"2012-01-27"},"publish_date":"2012-01-27","publish_status":"0","recid":"42515","relation_version_is_last":true,"title":["顕微ラマン散乱による窒化アルミニウム半導体製造装置用部品の耐食性に関する研究"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-07-27T10:50:59.401907+00:00"}