@article{oai:tohoku.repo.nii.ac.jp:00043900,
 author = {Ohno, Yutaka and Takeda, Seiji and Ichihashi, Toshinari and Iijima, Sumio},
 issue = {12},
 journal = {Journal of Applied Physics},
 month = {},
 note = {application/pdf, 学術論文 (Article), 251645 bytes},
 pages = {126107-1--126107-3},
 title = {Excavation rate of silicon surface nanoholes},
 volume = {99},
 year = {2006}
}