@article{oai:tohoku.repo.nii.ac.jp:00044188,
 author = {Goto, Takashi and Vargas, J. Roberto and Hirai, Toshio},
 issue = {3},
 journal = {Materials Transactions, JIM},
 month = {},
 note = {学術論文 (Article)},
 pages = {209--213},
 title = {Effect of Oxygen Gas Addition on Preparation of Iridium and Platinum Films by Metal-Organic Chemical Vapor Deposition},
 volume = {40},
 year = {1999}
}