@article{oai:tohoku.repo.nii.ac.jp:00044250,
 author = {Sakata, Masato and Kimura, Teiichi and Goto, Takashi},
 issue = {1},
 journal = {Materials Transactions},
 month = {},
 note = {学術論文 (Article)},
 pages = {58--63},
 title = {Microstructures and electrical properties of Ru-C nano-composite films by PECVD},
 volume = {48},
 year = {2007}
}