@article{oai:tohoku.repo.nii.ac.jp:00044274, author = {Kimura, Teiichi and Goto, Takashi}, issue = {3}, journal = {Materials Transactions}, month = {}, note = {学術論文 (Article)}, pages = {421--424}, title = {Rapid synthesis of yttria-stabilized zirconia films by laser chemical vapor deposition}, volume = {44}, year = {2003} }