@article{oai:tohoku.repo.nii.ac.jp:00047452,
 author = {Nishiyama, H. and Shigeta, M.},
 issue = {2},
 journal = {The European physical journal. Applied physics : EPJ},
 month = {},
 note = {application/pdf, 学術論文 (Article), 323166 bytes},
 pages = {125--133},
 title = {Numerical Simulation of an RF Inductively Coupled Plasma for Functional Enhancement by Seeding Vaporized Alkali Metal},
 volume = {18},
 year = {2002}
}