@article{oai:tohoku.repo.nii.ac.jp:00004809, author = {Saito, R. and Sano, J. and Ishigaki, N. and Kimura, T. and Yugo, S.}, issue = {5}, journal = {Journal of Applied Physics}, month = {Sep}, note = {application/pdf, 学術論文 (Article), 158304 bytes}, pages = {2559--2564}, title = {Theoretical analysis of the diffusive ion in biased plasma enhanced diamond chemical vapor deposition}, volume = {90}, year = {2001} }