@article{oai:tohoku.repo.nii.ac.jp:00053648, author = {Takahashi, Hirokazu and Ono, Takahito and Cho, Yasuo and Esashi, Masayoshi}, journal = {17th IEEE International Conference on Micro Electro Mechanical Systems, 2004. (MEMS)}, month = {}, note = {application/pdf, 学術論文 (Article), 科研費報告書収録論文(課題番号:13305010・基盤研究(A)(2) ・H13~H15/研究代表者:江刺, 正喜/ナノメートルの精度で動く分布型マイクロ・ナノマシン), 285752 bytes}, pages = {536--539}, title = {Diamond probe for ultra-high-density ferroelectric data storage based on scanning nonlinear dielectric microscopy}, year = {2004} }