@article{oai:tohoku.repo.nii.ac.jp:00053650,
 author = {Minh, Phan Ngoc and Hong, Phan Ngoc and Cuong, To Munh and Ono, Takahito and Esashi, Masayoshi},
 journal = {17th IEEE International Conference on Micro Electro Mechanical Systems, 2004 (MEMS)},
 month = {},
 note = {application/pdf, 学術論文 (Article), 科研費報告書収録論文(課題番号:13305010・基盤研究(A)(2) ・H13～H15/研究代表者:江刺, 正喜/ナノメートルの精度で動く分布型マイクロ・ナノマシン), 318382 bytes},
 pages = {430--433},
 title = {Utilization of carbon nanotube and diamond for electron field emission devices},
 year = {2004}
}