@article{oai:tohoku.repo.nii.ac.jp:00053651, author = {Bae, Joon Hyung and Minh, Phan Ngoc and Ono, Takahito and Esashi, Masayoshi}, journal = {TRANSDUCERS 2003 : the 12th International Conference on Solid-State Sensors, Actuators and Microsystems}, month = {}, note = {application/pdf, 学術論文 (Article), 科研費報告書収録論文(課題番号:13305010・基盤研究(A)(2) ・H13~H15/研究代表者:江刺, 正喜/ナノメートルの精度で動く分布型マイクロ・ナノマシン), 312546 bytes}, pages = {778--781}, title = {Diamond micro-Schottky emitter with an integrated heating element}, volume = {1}, year = {2003} }