@article{oai:tohoku.repo.nii.ac.jp:00053653,
 author = {Li, Xinghua and Abe, Takashi and Liu, Yongxun and Esashi, Masayoshi},
 issue = {6},
 journal = {Journal of Microelectromechanical Systems},
 month = {},
 note = {application/pdf, 学術論文 (Article), 科研費報告書収録論文(課題番号:13305010・基盤研究(A)(2) ・H13～H15/研究代表者:江刺, 正喜/ナノメートルの精度で動く分布型マイクロ・ナノマシン), 1034836 bytes},
 pages = {625--630},
 title = {Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass},
 volume = {11},
 year = {2002}
}