@article{oai:tohoku.repo.nii.ac.jp:00053654,
 author = {Zhang, De-Yuan and Ono, Takahito and Esashi, Masayoshi},
 journal = {TRANSDUCERS 2003 : the 12th International Conference on Solid-State Sensors, Actuators and Microsystems},
 month = {},
 note = {application/pdf, 学術論文 (Article), 科研費報告書収録論文(課題番号:13305010・基盤研究(A)(2) ・H13～H15/研究代表者:江刺, 正喜/ナノメートルの精度で動く分布型マイクロ・ナノマシン), 358450 bytes},
 pages = {1518--1521},
 title = {Piezoactuator-integrated monolithic microstage with six degrees of freedom},
 volume = {2},
 year = {2003}
}