@article{oai:tohoku.repo.nii.ac.jp:00053656,
 author = {Hara, Motoaki and Kuypers, Jan and Abe, Takashi and Esashi, Masayoshi},
 journal = {2003 IEEE MTT-S International Microwave Symposium Digest},
 month = {},
 note = {application/pdf, 学術論文 (Article), 科研費報告書収録論文(課題番号:13305010・基盤研究(A)(2) ・H13～H15/研究代表者:江刺, 正喜/ナノメートルの精度で動く分布型マイクロ・ナノマシン), 314775 bytes},
 pages = {1797--1800},
 title = {MEMS based thin film 2 GHz resonator for CMOS integration},
 volume = {3},
 year = {2003}
}