@misc{oai:tohoku.repo.nii.ac.jp:00091791, author = {小池, 淳義}, month = {}, note = {application/pdf, 博士学位論文の要旨及び審査結果の要旨 (Summary of Thesis(DR)), 434716 bytes, T1H142894}, title = {多品種,少量,超短時間半導体生産方式の研究}, year = {2002} }