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Impact of focused ion beam on structural and compositional analysis of interfaces fabricated by surface activated bonding
http://hdl.handle.net/10097/00129729
http://hdl.handle.net/10097/001297299671a26b-70f6-40ab-aeaa-ca48463c0063
名前 / ファイル | ライセンス | アクション |
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OHNO-Yutaka-2020Tour01-212.pdf (1.7 MB)
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© 2019 The Japan Society of Applied Physics
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2020-12-02 | |||||
タイトル | ||||||
タイトル | Impact of focused ion beam on structural and compositional analysis of interfaces fabricated by surface activated bonding | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Yutaka, Ohno
× Yutaka, Ohno× Hideto, Yoshida× Naoto, Kamiuchi× Ryotaro, Aso× Seiji, Takeda× Yasuo, Shimizu× Yasuyoshi, Nagai× Jianbo, Liang× Naoteru, Shigekawa |
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書誌情報 |
Japanese Journal of Applied Physics 巻 59, 号 SB, p. SBBB05-1-SBBB05-5, 発行日 2019-11-26 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0021-4922 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.7567/1347-4065/ab4b15 | |||||
情報源 | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://iopscience.iop.org/article/10.7567/1347-4065/ab4b15 | |||||
関連名称 | 出版社サイト | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
出版者 | ||||||
出版者 | IOP publishing | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | 学術論文(Ariticle) | |||||
登録日 | ||||||
日付 | 2020-12-02 | |||||
日付タイプ | Created | |||||
公開日(投稿完了日) | ||||||
日付 | 2020-12-02 | |||||
日付タイプ | Created | |||||
発行日 | ||||||
日付 | 2019-11-26 | |||||
日付タイプ | Created | |||||
公開範囲 | ||||||
値 | 学外 | |||||
登録者コメント | ||||||
利用は私的利用(著作権法第30条)および引用(著作権法第32条)の範囲内に限られる。 |