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Interdiffusion in Mo/Ge and Mo/Si Multilayer Thin Films
https://doi.org/10.50974/00043409
https://doi.org/10.50974/0004340967bf458d-b5ab-4b72-96c5-8541170f7f62
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
KJ00004200315.pdf (935.6 kB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||||||
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| 公開日 | 2008-05-02 | |||||||||
| タイトル | ||||||||||
| タイトル | Interdiffusion in Mo/Ge and Mo/Si Multilayer Thin Films | |||||||||
| 言語 | ||||||||||
| 言語 | eng | |||||||||
| 資源タイプ | ||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||
| 資源タイプ | departmental bulletin paper | |||||||||
| ID登録 | ||||||||||
| ID登録 | 10.50974/00043409 | |||||||||
| ID登録タイプ | JaLC | |||||||||
| 著者 |
Nakajima, Hideo
× Nakajima, Hideo
× Fujimori, Hiroyasu
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| 抄録 | ||||||||||
| 内容記述タイプ | Abstract | |||||||||
| 内容記述 | Multilayered Mo/Ge and Mo/Si thin films have been prepared by dual rf-sputtering technique, and the interdiffusion and structural change on annealing have been investigated by X-ray diffraction measurements. X-ray diffractometry shows that for the modulation wavelength λ shorter than 5 nm both Mo and Ge(Si) sublayers are amorphous, while for λ longer than 5 nm crystalline bcc structure appears in Mo sublayers. The interdiffusivities have been determined from the decay rate of satellite peak intensity around (000). The temperature dependence of the effective interdiffusivities in Mo/Ge and Mo/Si multilayer films is, respectively, expressed as D^~_<λ(Mo/Ge)>=1.3x10^<-16>exp[-(115±7)kJmol^<-1>/RT] m^2s^<-1>, and D^~_<λ(Mo/Si)>=2.0x10^<-16>exp[-(105±5)kJmol^<-1>/RT] m^2s^<-1>. On initial annealing, the satellite peak intensity decreases drastically and the modulation wavelength also decreases, which are interpreted to be due to structural relaxation and interdiffusion. The thermodynamic behaviour of the amorphous Mo-Ge system is discussed on the basis of the dependence of the effective interdiffusivity on λ. | |||||||||
| 書誌情報 |
Science reports of the Research Institutes, Tohoku University. Ser. A, Physics, chemistry and metallurgy 巻 35, 号 1, p. 1-18, 発行日 1990-03-23 |
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| ISSN | ||||||||||
| 収録物識別子タイプ | ISSN | |||||||||
| 収録物識別子 | 00408808 | |||||||||
| 書誌レコードID | ||||||||||
| 収録物識別子タイプ | NCID | |||||||||
| 収録物識別子 | AA00836167 | |||||||||
| フォーマット | ||||||||||
| 内容記述タイプ | Other | |||||||||
| 内容記述 | application/pdf | |||||||||
| 著者版フラグ | ||||||||||
| 出版タイプ | VoR | |||||||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||
| 出版者 | ||||||||||
| 出版者 | Tohoku University | |||||||||
| 資源タイプ | ||||||||||
| 内容記述タイプ | Other | |||||||||
| 内容記述 | 紀要類(bulletin) | |||||||||
| 登録日 | ||||||||||
| 日付 | 2008-05-02 | |||||||||
| 日付タイプ | Created | |||||||||
| 公開日（投稿完了日） | ||||||||||
| 日付 | 2008-05-02 | |||||||||
| 日付タイプ | Created | |||||||||
| 発行日 | ||||||||||
| 日付 | 1990-03-23 | |||||||||
| 日付タイプ | Created | |||||||||
| フォーマット | ||||||||||
| 内容記述タイプ | Other | |||||||||
| 内容記述 | 935640 bytes | |||||||||
| 更新日 | ||||||||||
| 日付 | 2010-01-27 | |||||||||
| 日付タイプ | Created | |||||||||
