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単結晶窒化ガリウム(GaN)基板の高速高精度加工法の開発 ―紫外線援用テープ研削法の提案―
http://hdl.handle.net/10097/00130590
http://hdl.handle.net/10097/001305901114fdcf-d7b0-4e68-a007-e251aa2eab33
名前 / ファイル | ライセンス | アクション |
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SHIMADA-Keita-2020Tour01-130.pdf (1.7 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2021-03-05 | |||||
タイトル | ||||||
タイトル | 単結晶窒化ガリウム(GaN)基板の高速高精度加工法の開発 ―紫外線援用テープ研削法の提案― | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
鷹巣, 良史
× 鷹巣, 良史× 嶋田, 慶太× 水谷, 正義× 厨川, 常元 |
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書誌情報 |
砥粒加工学会誌 巻 63, 号 11, p. 569-574, 発行日 2019-11-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0914-2703 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.11420/jsat.63.569 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
出版者 | 砥粒加工学会 | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | 学術論文(Ariticle) | |||||
登録日 | ||||||
日付 | 2021-03-05 | |||||
日付タイプ | Created | |||||
公開日(投稿完了日) | ||||||
日付 | 2021-03-05 | |||||
日付タイプ | Created | |||||
発行日 | ||||||
日付 | 2019-11-01 | |||||
日付タイプ | Created | |||||
公開範囲 | ||||||
値 | 学外 |