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Effect of Oxygen Gas Addition on Preparation of Iridium and Platinum Films by Metal-Organic Chemical Vapor Deposition
http://hdl.handle.net/10097/52260
http://hdl.handle.net/10097/5226053344adb-3590-4dfe-b310-6c026a070df9
名前 / ファイル | ライセンス | アクション |
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0916-1821-40(3)-209.pdf (1.1 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2012-01-27 | |||||
タイトル | ||||||
タイトル | Effect of Oxygen Gas Addition on Preparation of Iridium and Platinum Films by Metal-Organic Chemical Vapor Deposition | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Goto, Takashi
× Goto, Takashi× Vargas, J. Roberto× Hirai, Toshio |
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書誌情報 |
Materials Transactions, JIM 巻 40, 号 3, p. 209-213, 発行日 1999 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0916-1821 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
出版者 | 日本金属学会 | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | 学術論文 (Article) | |||||
登録日 | ||||||
日付 | 2012-01-27 | |||||
日付タイプ | Created | |||||
公開日(投稿完了日) | ||||||
日付 | 2012-01-27 | |||||
日付タイプ | Created | |||||
発行日 | ||||||
日付 | 1999 | |||||
日付タイプ | Created | |||||
公開範囲 | ||||||
値 | 学外 | |||||
登録者コメント | ||||||
後藤 孝 | ||||||
大学情報DB画面区分 | ||||||
値 | K020 | |||||
大学情報DBリンク番号 | ||||||
105136 | ||||||
大学情報DBリポジトリ区分 | ||||||
値 | 許諾 | |||||
更新日 | ||||||
日付 | 2012-01-27 | |||||
日付タイプ | Created |