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Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass
http://hdl.handle.net/10097/48059
http://hdl.handle.net/10097/48059c53884c7-9668-4685-b2fc-da57cb9ab89f
名前 / ファイル | ライセンス | アクション |
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10.1109-JMEMS.2002.805211.pdf (1.0 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2010-04-21 | |||||
タイトル | ||||||
タイトル | Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Li, Xinghua
× Li, Xinghua× Abe, Takashi× Liu, Yongxun× Esashi, Masayoshi |
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著者別名 | ||||||
姓名 | 江刺, 正喜 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 科研費報告書収録論文(課題番号:13305010・基盤研究(A)(2) ・H13~H15/研究代表者:江刺, 正喜/ナノメートルの精度で動く分布型マイクロ・ナノマシン) | |||||
書誌情報 |
Journal of Microelectromechanical Systems 巻 11, 号 6, p. 625-630, 発行日 2002 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1057-7157 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1109/JMEMS.2002.805211 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
出版者 | Institute of Electrical and Electronics Engineers | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | 学術論文 (Article) | |||||
登録日 | ||||||
日付 | 2010-04-21 | |||||
日付タイプ | Created | |||||
公開日(投稿完了日) | ||||||
日付 | 2010-04-21 | |||||
日付タイプ | Created | |||||
発行日 | ||||||
日付 | 2002 | |||||
日付タイプ | Created | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | 1034836 bytes | |||||
公開範囲 | ||||||
値 | 学外 | |||||
大学情報DBリポジトリ区分 | ||||||
値 | 許諾 | |||||
更新日 | ||||||
日付 | 2010-04-21 | |||||
日付タイプ | Created |