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Piezoactuator-integrated monolithic microstage with six degrees of freedom
http://hdl.handle.net/10097/48060
http://hdl.handle.net/10097/4806029872b26-e514-48d8-a2ec-cfe3d2102776
名前 / ファイル | ライセンス | アクション |
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0-7803-7731-1-2003-2-1518.pdf (358.4 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2010-04-21 | |||||
タイトル | ||||||
タイトル | Piezoactuator-integrated monolithic microstage with six degrees of freedom | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Zhang, De-Yuan
× Zhang, De-Yuan× Ono, Takahito× Esashi, Masayoshi |
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著者別名 | ||||||
姓名 | 江刺, 正喜 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 科研費報告書収録論文(課題番号:13305010・基盤研究(A)(2) ・H13~H15/研究代表者:江刺, 正喜/ナノメートルの精度で動く分布型マイクロ・ナノマシン) | |||||
書誌情報 |
TRANSDUCERS 2003 : the 12th International Conference on Solid-State Sensors, Actuators and Microsystems 巻 2, p. 1518-1521, 発行日 2003 |
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ISBN | ||||||
識別子タイプ | ISBN | |||||
関連識別子 | 0-7803-7731-1 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
出版者 | Institute of Electrical and Electronics Engineers | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | 学術論文 (Article) | |||||
登録日 | ||||||
日付 | 2010-04-21 | |||||
日付タイプ | Created | |||||
公開日(投稿完了日) | ||||||
日付 | 2010-04-21 | |||||
日付タイプ | Created | |||||
発行日 | ||||||
日付 | 2003 | |||||
日付タイプ | Created | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | 358450 bytes | |||||
公開範囲 | ||||||
値 | 学外 | |||||
大学情報DBリポジトリ区分 | ||||||
値 | 許諾 | |||||
更新日 | ||||||
日付 | 2010-04-21 | |||||
日付タイプ | Created |